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Mini CVD Tube Furnace With 2 Channel Gas Mixer and Vacuum Pump
Our Mini CVD tube furnace is a split tube furnace for heating samples up to 1000°C. The left flange is with 304SS barbed hose fitting to connect with a 4L/S rotary vane vacuum pump. The right flange is used to connect a 2 channel gas mixing station through the 1/4" gas pipe. The precision temperature controller will provide 30 segments heating and cooling steps with +/- 1 °C accuracy.
Brief Introduction:
Our Mini CVD tube furnace is a split tube furnace for heating samples up to 1000°C. The left flange is with 304SS barbed hose fitting to connect with a 4L/S rotary vane vacuum pump. The right flange is used to connect a 2 channel gas mixing station through the 1/4" gas pipe. The precision temperature controller will provide 30 segments heating and cooling steps with +/- 1 °C accuracy.
Technical Parameter:
| Furnace
|
Chamber Structure | Split |
| Display | LED | |
| Working Temp. | ≤1000°C | |
| Heating Rate | Suggestion 0~10°C/min, max. 20°C/min | |
| Temperature Zone | Single | |
| Heating Zone Length | 200mm | |
| Tube Size | 50x700mm (OD x L) | |
| Heating Element | Resistance wire with Mo | |
| Thermocouple | N Type | |
| Max. Power | 2 KW | |
| Working Voltage | AC 208V-240V single phase, 50Hz | |
| Temperature Control | PID automatic control via SCR power control | |
| Heating curves | 30 steps programmable | |
| Chamber material | Alumina Fiber | |
| Warranty | One year limited warranty (Consumable parts such as heating elements are not covered by the warranty) | |
| Gas Mixing Station | Two floating flow meters 10 to 100 mL/min flow rate range.
FFC1: 10-100ml/min for Ar FFC2: 10-100ml/min for O2 Or according to your requriement. |
|
| Rotary Vance Vacuum Pump | Support furnace vacuum to reach 10pa (Need to add extra digital vacuum gauge)
Higher vacuum is avaible with our melecular pump systems which is with extra cost |
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Note: Different Tube Sizes and temperature are available based on your requirement, pls contact us freely if there is any specific requirement.
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