Dual Zones CVD Furnace with Digital Vacuum Gauge and Vacuum Pump

Chemical vapor deposition (CVD) is a film growth technique that make gaseous substance containing thin films react by means of a glow discharge. According to experimental requirements, Our company designed this equipment to meet the needs of various types of film study.

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Product Introduction

Brief Introduction:

Technical Parameter:

Tube Furnace		LCD touch screen
	Chamber	Split type
	Max. Temperature	1200℃ for short time
	Continuous Working Temp.	≤1100℃
	Heating Rate	Suggestion: 0~10℃/min (max. 20℃/min)
	Temperature Zone	Two zones: 200+200mm
	Heating Element	Resistance Wire with Mo
	Thermocouple	N type
	Temperature Control Accuracy	±1℃
	Tube Size	60 x 1200mm (OD x L)
	Tube Size	Material: Quartz
	Temperature Control	PID automatic control via SCR power control
	Heating curves	30 steps programmable
	Vacuum Flange	Stainless Steel vacuum flange with valve
	Power	220V, 50 Hz, single phase at max. 4KW
Vacuum Pump System	Rotary Vane Vacuum Pump(Include KF25 Adpater, bellow for vacuum pump and cart with wheel, System with automatic solenoid valve)	Ultimate vacuum 10-3 Torr. And vacuum inside the tube is around 10-1 Torr. Flow rate: 8CFM (4L/S, 240L/min)
Mass Flow meters	4 precision mass flow meters : MFC 1: Gas flow range from 0~100 sccm MFC 2&3: Control range from 0~200 sccm MFC 4: Range from 0~500 sccm (or according to your requirement) One gas mixing tank is installed on bottom case with liquid release valve 4 stainless steel needle valves is installed on left side of bottom case to control 4type gases mixing manually
Inficon Digital Vacuum Gauge	3.8x10^-5 to 1125 Torr measurement range Anti-corrosive, gas-type independent