Gas Mixing Station with Three Channel Float Flowmeters and Valves

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Product Introduction

Brief Introduction:

It is designed to mix and deliver 3 different gases to the our CVD system at a low cost. The system is installed in a heavy-duty mobile cart where a tube furnace can be placed on top of it. The flow rates are adjustable via three float flow meters.

 

Technical Parameter:

Flow rate A: 10 - 100 mL/min

B: 16 - 160 mL/min

C: 25 - 250 mL/min

Accuracy:+- 1.5% (F.S.)

Mechanical Pressure Gauge (mixing tank) -0.1-0.15 MPa, (0.01 MPa/grit)
Gas Mixing Tank SS304
Gas Schematics Three needle valves for three gas inlets

One valve for a gas outlet

Gas Inlets and Outlets 1/4" compression tube fittings

12' length 1/4" PTFE pipe is included for immediate use

 

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