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Brief Introduction:
It is designed to mix and deliver 3 different gases to the our CVD system at a low cost. The system is installed in a heavy-duty mobile cart where a tube furnace can be placed on top of it. The flow rates are adjustable via three float flow meters.
Technical Parameter:
Flow rate | A: 10 - 100 mL/min
B: 16 - 160 mL/min C: 25 - 250 mL/min Accuracy:+- 1.5% (F.S.) |
Mechanical Pressure Gauge (mixing tank) | -0.1-0.15 MPa, (0.01 MPa/grit) |
Gas Mixing Tank | SS304 |
Gas Schematics | Three needle valves for three gas inlets
One valve for a gas outlet |
Gas Inlets and Outlets | 1/4" compression tube fittings
12' length 1/4" PTFE pipe is included for immediate use |