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It is a compact two-channel trace gas mixer for inert gas control in small tube furnaces, glove boxes, plasma cleaner, small PECVD system. This mixer regulates both line pressure and flow rate, and assures that you get the precise mixture at a lower cost and compact design. You can easily adapt this unit to most operations in atmospheric chambers.
Brief Introduction:
It is a compact two-channel trace gas mixer for inert gas control in small tube furnaces, glove boxes, plasma cleaner, small PECVD system. This mixer regulates both line pressure and flow rate, and assures that you get the precise mixture at a lower cost and compact design. You can easily adapt this unit to most operations in atmospheric chambers.
Technical Parameter:
Floating Flow-meter | Two Channel Floating Flow-meter with various flow rate range
FFC1: 10 - 100 mL/min FFC2: 16 - 160 mL/min Or according to your requirement |
Mechanical Pressure Gauge | -0.1-0.15 MPa, (0.01 MPa/grit) |
Pipe fitting | Two Gas Inlet fittings and one gas outlet fitting.are Installed in the mini box. |