2-8 Channel MFC Gas Control System with LCD Touch Screen

The gas mixing station is designed for the control of 1-8 types of gasses flowing through vacuum-sealed tube furnaces at a low cost. It is installed in a heavy-duty mobile cart where the tube furnace can be placed on the top.  LCD touch screen is integrated to provide easy control of the gas flow rate of each independent channel. Such a system is suitable for using with CVD furnaces to study the gas environmental influence on various materials.

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Product Introduction

Brief Introduction:

The gas mixing station is designed for the control of 1-8 types of gasses flowing through vacuum-sealed tube furnaces at a low cost. It is installed in a heavy-duty mobile cart where the tube furnace can be placed on the top.  LCD touch screen is integrated to provide easy control of the gas flow rate of each independent channel. Such a system is suitable for using with CVD furnaces to study the gas environmental influence on various materials.

 

Technical Parameter:

Function Two Channels Three Channels Four Channels Customized Four to Nine Channels
Computerized
Mass Flow Controller
Controlling Range:

Controller 1: 1~200 SCCM

Controller 2: 1~500 SCCM

 

Controlling Range:

Controller 1: 0~100 SCCM

Controller 2: 1~200 SCCM

Controller 3: 1~500 SCCM

Controlling Range:

Controller 1: 0~100 SCCM

Controller 2: 1~200 SCCM

Controller 3: 1~200 SCCM

Controller 4: 1~500 SCCM

Select Range from below to make Customised  2 to 9 Channels:

0~100 SCCM

1~200 SCCM

1~500 SCCM

1~500 SCCM

1~500 SCCM

1~500 SCCM

Accuracy Accuracy: ±1.5%FS
Working Temp and Pressure Working Temp. : 5~45 ºC
Max. Pressure: 3x106 Pa
Working Voltage AC 220V Single phase 50/60Hz
Power  23W
LCD Touch Screen 7” LCD Touch Screen
Mechanical Pressure Gauge Measurement Range:-0.1~0.15 MPa
Needle Valve 316 Stainless Steel
Gas Mixing Tank Φ80X120mm
Stop Valve & Fittings  316 stainless steel needle valve,

 

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