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The gas mixing station is designed for the control of 1-8 types of gasses flowing through vacuum-sealed tube furnaces at a low cost. It is installed in a heavy-duty mobile cart where the tube furnace can be placed on the top. LCD touch screen is integrated to provide easy control of the gas flow rate of each independent channel. Such a system is suitable for using with CVD furnaces to study the gas environmental influence on various materials.
Brief Introduction:
The gas mixing station is designed for the control of 1-8 types of gasses flowing through vacuum-sealed tube furnaces at a low cost. It is installed in a heavy-duty mobile cart where the tube furnace can be placed on the top. LCD touch screen is integrated to provide easy control of the gas flow rate of each independent channel. Such a system is suitable for using with CVD furnaces to study the gas environmental influence on various materials.
Technical Parameter:
Function | Two Channels | Three Channels | Four Channels | Customized Four to Nine Channels |
Computerized Mass Flow Controller |
Controlling Range:
Controller 1: 1~200 SCCM Controller 2: 1~500 SCCM
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Controlling Range:
Controller 1: 0~100 SCCM Controller 2: 1~200 SCCM Controller 3: 1~500 SCCM |
Controlling Range:
Controller 1: 0~100 SCCM Controller 2: 1~200 SCCM Controller 3: 1~200 SCCM Controller 4: 1~500 SCCM |
Select Range from below to make Customised 2 to 9 Channels:
0~100 SCCM 1~200 SCCM 1~500 SCCM 1~500 SCCM 1~500 SCCM 1~500 SCCM |
Accuracy | Accuracy: ±1.5%FS | |||
Working Temp and Pressure | Working Temp. : 5~45 ºC Max. Pressure: 3x106 Pa |
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Working Voltage | AC 220V Single phase 50/60Hz | |||
Power | 23W | |||
LCD Touch Screen | 7” LCD Touch Screen | |||
Mechanical Pressure Gauge | Measurement Range:-0.1~0.15 MPa | |||
Needle Valve | 316 Stainless Steel | |||
Gas Mixing Tank | Φ80X120mm | |||
Stop Valve & Fittings | 316 stainless steel needle valve, |